Polytetrafluoroethylene (PTFE) membrane filters from W. L. Gore & Associates Inc. can be used for liquid filtration applications in microelectronics processing, including ultrapure water, deionized water, and high purity chemical processing. The filters can achieve higher flow in comparison to other microfiltration technologies, according to the company.
GORE Filters enable semiconductor fabs to realize both improved performance and lower cost of ownership. The drop-in substitution of GORE Filters can upgrade retention performance and reduce particle counts while maintaining desired flow rate, as well as enabling reduced processing times, higher flow rates, and faster bath turnovers.
For processors of high-purity bulk chemicals used in semiconductor fabrication and other microelectronics manufacturing processes, the use of GORE Filters has enabled improved product quality, increased production capacity, and reduced cost of filtration for high viscosity fluids, acids, bases, solvents, and specialty chemicals.
This SEMICON West 2012 product was published in the July/August 2012 issue of Controlled Environments magazine, p. 17.