Opto Diode, a division of ITW and a member of the ITW Photonics Group, offers the ODD-SXUV-DLPSD, a duo-lateral UV/EUV submicron-position resolution sensor. The device provides a stable response after exposure to ultraviolet and/or extreme ultraviolet radiation. It is available in a TO-8 windowless package to minimize changes in the diode’s responsivity after exposure to intense UV/EUV photons. With a 5 mm x 5 mm active area, the ODD-SXUV-DLPSD is suitable for applications in advanced lithography, and any other positioning application requiring the use of a sub 200 nm wavelength.
The continuous position sensing photodiode is designed for position detection of light from 1 nm to 400 nm wavelengths. The responsivity at 13 nm is typically 0.20 A/W; responsivity at 254 nm is typically 0.02 A/W. Dark current, under operating conditions, is 10 (typical) and 50 (maximum) nA. The ODD-SXUV-DLPSD features reverse breakdown voltage of a minimum of 50 volts and a capacitance of 40 (typical) to 60 (maximum) pF. Operating and storage temperatures range from -10 degrees C to 40 degrees C (ambient) and from -20 degrees C to 80 degrees C (in nitrogen or vacuum conditions). The maximum junction temperature is 70 degrees C and the lead-soldering temperature is 260 degrees C at 0.080 in. from the case for 10 seconds.