eVue Digital Imaging System

The eVue digital imaging system enables productivity gains in semiconductor wafer navigation and testing. At the core of the system is a multi-CCD microscope with high-definition digital video and wide field/high magnification capabilities. The objective lens mount stores lens-microscope performance information together with the objective lens. When a lens is changed for different test configuration, it reads the new lens data and is automatically configured and optimized. With this, wafer navigation, probe positioning accuracy and on-screen measuring tape functions are all automatically optimized. The toolkit has three software operation modes: Multi-Cam, Multi-View and Multi-Z. Multi-Cam mode offers one, two or three simultaneous live video views, and each at a different perspective of the same device under test, facilitating probe navigation and tracking. Multi-View mode enables probe-card alignment and multiple test device viewing by utilizing the capability to see multiple digital views, each at different wafer locations and magnifications. Multi-Z mode provides microscope auto-focus, optical height sensing and wafer profiling.