Mott Corp. offers two ultra high purity gas filters to its all 316LSS Defender Filter product line, specifically designed to meet the need to greater volumes of gas with superior filtration and pressure drop performance. These filters give semiconductor facilities and gas delivery system engineers a compact, robust, high efficiency filter option.
The GasShield Defender DEF2000 Series Filters are designed to provide 9 log reduction of particles down to 3 nm at flow rates of over 2,000 slpm. Maximum operating pressures is 2,500 psig (172.50 barg) and maximum operating temperatures up to 842°F. The DEF2000 is designed for high flow bulk specialty and inert gas delivery systems.
The GasShield Defender DEF4000 Series Filters are designed to provide 9 log reduction of particles down to 3 nm t flow rates over 4,000 slpm. With the most filtration capacity of any all-metal UHP filter on the market, the DEF4000 allows gas delivery systems engineers to significantly reduce the footprint of the bulk gas filter skids, gas panels, and other gas pad equipment.
Mott offers Class 100 and Class 10,000 manufacturing environments, with DI water cleaning and cleanroom packaging services.