Entegris Inc.offers a platform of CMP filtration solutions using nano-melt-blown (NMB) filtration technology.
The filter platform using NMB media now includes the Planargard bulk, Solaris point-of-tool, and Planarcap point-of-dispense families to provide contamination control solutions throughout the CMP process area. The media utilizes the increased porosity of the nano-fibers to reduce shear stress placed upon the slurry during transport and filtration operations. These innovations result in extended filter lifetime and greater removal of defect-causing contaminants.
