The H-850KMLD hexapod system from Physik Instrumente provides 1µm minimum incremental motion over a 100mm travel range in XY and 0.5µm in the Z direction. The repeatability in the 3 linear axes is ±1µm, and ±5µrad / 9µrad in the rotary axes.
Hexapod applications include precision manufacturing and automation; astronomical telescopes; satellite antenna alignment; optics alignment; medical tumor treatment and surgery; high energy physics; aerospace; semiconductor manufacturing; and photonics components manufacturing.
All PI hexapods are delivered with a special hexapod controller, an extensive software package, and are easy to use and integrate. The dedicated C-887 hexapod multiaxis-vector controller is commanded directly in Cartesian coordinates. The user can specify a random pivot point in space with a single software command, a feature that is critical in automated optical and mechanical alignment applications. LabVIEW and text-based programming languages under Microsoft Windows or Linux are supported by libraries and program examples.
