Plasma Module 

The Plasma Module allows users to model low temperature, non-equilibrium discharges for a wide range of industrial applications. Based on COMSOL Multiphysics, the module is designed for researchers, engineers and experimentalists in the field of plasma science. Target application areas utilizing plasmas include light sources, semiconductor processes, surface coating and medical sterilization. The module is accompanied by a suite of tutorial and industrially relevant models which serve as both instructional examples and a foundation for future work.