Meller Optics Inc. offers custom fabricated sapphire wafer carriers for thinning semiconductors that are more durable than quartz and are impervious to polishing abrasives and solvents.
The wafer carriers feature Moh 9 hardness and strength due to off-axis crystal growth; permitting their custom fabrication as thin as 0.018-in. in 2-6-in. diameter sizes. Suitable for the uniform thinning of semiconductor materials such as GaAs, they can be custom perforated for vacuum hold-down or delamination and can withstand repeated use.
Providing part-to-part uniformity with +/- 1.2 um thickness and parallelism to 10 arc-sec., depending upon size, the wafer carriers are are chip-, chemical-, and scratch-resistant and can be supplied with reference flats and laser markings.
