ClassOne Technology has opened a new cleanroom and applications lab in Atlanta, Ga. The Class 100 facility will focus specifically on wet chemical processing such as electroplating, metal lift-off, resist Strip, polymer removal, FEOL and BEOL cleaning, dielectric and metal etching. The new laboratory will complement ClassOne’s current Metrology Cleanroom Lab in Atlanta, considerably expanding the total size and capabilities of the facility.
“ClassOne has made a substantial investment and created an applications lab that is state-of-the-art, rivaling some of the largest manufacturers,” says Kevin Witt, ClassOne’s VP of Technology. “In addition to a broad array of wet-processing tools, the lab also provides a full complement of metrology equipment and instrumentation, which allows users to measure and analyze defects, film thickness, film stress, and virtually all the other features and qualities of dielectric and metal films.”
Should additional analysis ever be needed, ClassOne also has access to the lab at the Institute for Electronics and Nanotechnologyat nearby Georgia Tech.
ClassOne’s new facility will give customers access to explore and develop wet-chemistry applications on all types on substrates and in sizes from 100 to 200mm. The lab will also serve as a working showcase of ClassOne Technology’s own wet processing tools, including electroplating, SAT, SST, and SRD systems. Customers will be able to evaluate equipment first hand and “try before they buy.” Additionally, the new facility will provide ClassOne Technology with a state-of-the-art laboratory for developing, testing, and enhancing its new equipment.
Release Date: July 9, 2014
Source: ClassOne Technology