Newport Corp. has developed long-lived deep ultraviolet excimer laser mirrors with projected lifetimes greater than 30 billion pulses when used in the proper photocontamination controlled environment. The mirrors feature all-dielectric high reflector coatings to minimize absorption and maximize reflected energy at 193 nm.
The high-energy laser mirrors are designed with Excimer-grade UV fused silica substrates which are polished to better than λ/10 flatness and 10-5 surface quality to preserve wavefront quality and maintain stability. All coating and testing is done in a photocontamination-controlled deep UV cleanroom that has been qualified to 193 nm standards.
The laser mirrors offer high laser damage resistance. Pet-G and metal foil packaging ensure that parts are delivered clean and protected from any environmental photocontamination.