Vibration isolation workstations and related equipment are used in cleanrooms around the world to improve productivity for research and other high-precision work such as manufacturing semiconductors and optics. In general, the more precise the work, the more vibration control is required beneath it. Because such high-precision equipment must also match the appropriate class of cleanroom specifications, today’s market offers a sometimes confusing array of vibration isolation products, many of which did not exist 20 years ago. With so many choices, it is important to match the equipment to the application.
Vibration isolation workstations for use in cleanrooms are typically designed to minimize horizontal surfaces and facilitate wipedown. Completely enclosed isolation modules and vented exhaust systems are also available to keep these workstations in compliance with cleanroom standards.
A simple vibration isolation system can be represented as a mass, spring, and dashpot. The mass (m) is infinitely rigid. The spring is weightless, and its stiffness (k) can be measured in pounds per inch. The damper, or dashpot, is also weightless, and its damping coefficient (c) is typically measured in pounds per inch per second.
Most vibration isolation equipment is Class 1000 compatible, and Class 100 compatibility is also fairly common. Most manufacturers of this equipment make sure that certain models can be configured for Class 10 compatibility if the customer requests it. Equipment with Class 1 compatibility is harder to find across the board, but at least when you find it you know the pertinent attributes have not been “tacked on” but rather designed with only the specialized Class 1 market in mind.
From: “Vibration Isolation in Cleanrooms: A System for Virtually Every Application”
