Last month we discussed Surface Acoustic Wave (SAW) detectors for monitoring Airborne Molecular Contamination (AMC). We indicated that contaminants on the sensor chip can be identified using Time of Flight Secondary Ion Mass Spectrometry (TOF-SIMS).
- Geosling and Koran, Chapter 3.2, “Contamination Control and Analytical Techniques,” in Handbook for Critical Cleaning, Kanegsberg & Kanegsberg ed., CRC Press, (2001).
- “Time-of-Flight Secondary Ion Mass Spectrometry (ToF SIMS),” Amy Walker’s Research Group At Washington University, http://wunmr.wustl.edu/~walker/ToF_SIMS.html
- “What is Time-of-Flight Secondary Ion Mass Spectrometry? (TOF SIMS)?” Surface Science Western Analytical, http://www.uwo.ca/ssw/services/tofsims.html