Research & Development World

  • R&D World Home
  • Topics
    • Aerospace
    • Automotive
    • Biotech
    • Careers
    • Chemistry
    • Environment
    • Energy
    • Life Science
    • Material Science
    • R&D Management
    • Physics
  • Technology
    • 3D Printing
    • A.I./Robotics
    • Software
    • Battery Technology
    • Controlled Environments
      • Cleanrooms
      • Graphene
      • Lasers
      • Regulations/Standards
      • Sensors
    • Imaging
    • Nanotechnology
    • Scientific Computing
      • Big Data
      • HPC/Supercomputing
      • Informatics
      • Security
    • Semiconductors
  • R&D Market Pulse
  • R&D 100
    • Call for Nominations: The 2025 R&D 100 Awards
    • R&D 100 Awards Event
    • R&D 100 Submissions
    • Winner Archive
    • Explore the 2024 R&D 100 award winners and finalists
  • Resources
    • Research Reports
    • Digital Issues
    • R&D Index
    • Subscribe
    • Video
    • Webinars
  • Global Funding Forecast
  • Top Labs
  • Advertise
  • SUBSCRIBE

X-ray diffraction method observes thin films without damaging them

By R&D Editors | October 10, 2012

 

(Top) Focused beam coherent X-ray nanodiffraction patterns collected from a SiGe-on-SOI prototype device edge and (middle and bottom) projected strain field reconstructed by ptychographic methods.

The theoretical and experimental framework of a new coherent diffraction strain imaging approach was developed in the Center for Nanoscale Materials’ X-Ray Microscopy Group in collaboration with Argonne’s Materials Science Division, together with users from IBM.

Nanofocused X-ray Bragg projection ptychography creates a tool to efficiently image strain fields with unperturbed boundary conditions in technologically and scientifically relevant energy systems.

This new technique is capable of imaging lattice distortions in thin films nondestructively at spatial resolutions of less than 20 nm using coherent nanofocused hard X-rays. This work marks a significant step forward in the development of nondestructive coherent X-ray diffraction imaging techniques for the study of nanoscale lattice features in real materials under real conditions. This study, in which structural subtleties were resolved in a device prototype arising from both intrinsic size effects and extrinsic boundary conditions, paves the way for nondestructive studies of structure in materials at nanometer length scales where prediction, measurement, and control of strain is difficult.

The data obtained from the depicted system were used to determine the lattice strain profile in an epitaxial SiGe stressor layer of a silicon prototype device. Measurement of strain from epitaxial lattice mismatches and device processing can test continuum elastic modeling predictions of nanoscale strain distributions.

X-Ray Microscopy Group

Quantitative nanoscale imaging of lattice distortions in epitaxial semiconductor heterostructures using nanofocused X-ray Bragg projection ptychography

Source: Argonne National Laboratory

Related Articles Read More >

Marine-biodegradable polymer is as strong as nylon
Unilever R&D head lifts lid on AI, robots and beating the ‘grease gap’
First CRISPR-edited spider spins red fluorescent silk
KIST carbon nanotube supercapacitor holds capacity after 100,000 cycles
rd newsletter
EXPAND YOUR KNOWLEDGE AND STAY CONNECTED
Get the latest info on technologies, trends, and strategies in Research & Development.
RD 25 Power Index

R&D World Digital Issues

Fall 2024 issue

Browse the most current issue of R&D World and back issues in an easy to use high quality format. Clip, share and download with the leading R&D magazine today.

Research & Development World
  • Subscribe to R&D World Magazine
  • Enews Sign Up
  • Contact Us
  • About Us
  • Drug Discovery & Development
  • Pharmaceutical Processing
  • Global Funding Forecast

Copyright © 2025 WTWH Media LLC. All Rights Reserved. The material on this site may not be reproduced, distributed, transmitted, cached or otherwise used, except with the prior written permission of WTWH Media
Privacy Policy | Advertising | About Us

Search R&D World

  • R&D World Home
  • Topics
    • Aerospace
    • Automotive
    • Biotech
    • Careers
    • Chemistry
    • Environment
    • Energy
    • Life Science
    • Material Science
    • R&D Management
    • Physics
  • Technology
    • 3D Printing
    • A.I./Robotics
    • Software
    • Battery Technology
    • Controlled Environments
      • Cleanrooms
      • Graphene
      • Lasers
      • Regulations/Standards
      • Sensors
    • Imaging
    • Nanotechnology
    • Scientific Computing
      • Big Data
      • HPC/Supercomputing
      • Informatics
      • Security
    • Semiconductors
  • R&D Market Pulse
  • R&D 100
    • Call for Nominations: The 2025 R&D 100 Awards
    • R&D 100 Awards Event
    • R&D 100 Submissions
    • Winner Archive
    • Explore the 2024 R&D 100 award winners and finalists
  • Resources
    • Research Reports
    • Digital Issues
    • R&D Index
    • Subscribe
    • Video
    • Webinars
  • Global Funding Forecast
  • Top Labs
  • Advertise
  • SUBSCRIBE