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HEAD-Matrix ALD+

Category: Software/Services
Developers: Industrial Technology Research Institute (ITRI)
Taiwan

Product Description:The Head-Matrix ALD+ system elevates the process performance of a high aspect ratio, multicomponent uniformity, and precise application of dense thin films in next-generation semiconductor processing. Its dual deposition mode design provides uniform conformal deposition of high aspect ratio and multi-component thin films of via hole in memory, 3D IC.

HEAD-Matrix ALD+-Photo

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