HEAD-Matrix ALD+
Category: Software/Services
Developers: Industrial Technology Research Institute (ITRI)
Taiwan
Product Description:The Head-Matrix ALD+ system elevates the process performance of a high aspect ratio, multicomponent uniformity, and precise application of dense thin films in next-generation semiconductor processing. Its dual deposition mode design provides uniform conformal deposition of high aspect ratio and multi-component thin films of via hole in memory, 3D IC.
Developers: Industrial Technology Research Institute (ITRI)
Taiwan
Product Description:The Head-Matrix ALD+ system elevates the process performance of a high aspect ratio, multicomponent uniformity, and precise application of dense thin films in next-generation semiconductor processing. Its dual deposition mode design provides uniform conformal deposition of high aspect ratio and multi-component thin films of via hole in memory, 3D IC.
HEAD-Matrix ALD+-Photo