analySIS waferInspector and filterInspector
analySIS waferInspector and the analySIS filterInspector are system solutions for the inspection of blank wafers and circular filters. Both systems offer fully automatic analysis, classification and documentation of defects on wafers, residues, filters or other substrates. Wafer or filter analysis involves analyzing large areas in the shortest time possible. The software was conceived to provide fast analysis at high resolution. This is how circular filters 50 mm in diameter are completely characterized within 15 minutes and at a resolution of 0.8 μm. These speeds are achieved using special cameras and motorized stage controllers.