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MetaLitho3D

Category: Other
Developers: Lawrence Livermore National Laboratory


Product Description:MetaLitho3D is a parallel 3D nanolithography platform that employs over 100,000 high-contrast metalenses to perform wafer-scale two-photon lithography. Compared to current commercial solutions, it fundamentally changes the way 3D nanolithography is performed, providing a thousand-fold improvement to fabrication throughput, better quality, unlimited scalability and applicability. The platform for massively parallel 3D nanolithography using a metalens array.Its many applications include micro-electronics, photonics, architected materials, energy, and biomedicine, meeting their market need for high-resolution, high-throughput fabrication of wafer-scale components, devices and systems.


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