CAMECA is a global leader in elemental and isotopic microanalysis for government, academic, and industry research and process control. CAMECA, a business unit of AMETEK, provides a diverse range of advanced characterization technologies, including Secondary Ion Mass Spectrometry (SIMS) and Atom Probe Tomography (APT) nanoanalysis and metrology solutions for semiconductors. These instruments are recognized by the international IC community as best-in-class for the investigation of new materials and structures for semiconductors.

In this Q&A article, three experts from CAMECA address the techniques, applications, and the future of semiconductor R&D.

• How does SIMS work and what are its advantages?
• What are its key advantages and disadvantages?
• What are some semiconductor applications for SIMS?
• What is a semiconductor application for APT?

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