The Hard X-Ray Scanning Microscope with Multilayer Laue Lens Nanofocusing Optics is a high throughput scientific imaging tool that routinely provides sub-20 nm spatial resolution imaging. The sub-20 nm imaging resolution was achieved by using the MLL optics for focusing and by implementing a state-of-the-art ultra-stable piezo-based positioning system coupled with active interferometric feedback control, the combination of which provides unprecedented vibrational stability (better than 2 nm at all frequencies) and long-term thermal drifts better than 2 nm/hour. This novel MLL-based vacuum-compatible microscope is a great general purpose X-ray microscopy tool that is suitable for a broad range of imaging experiments. For example, the following imaging techniques are currently supported: X-ray fluorescence (XRF), ptychography, diffraction, differential phase contrast and X-ray absorption spectroscopy. The system is installed at the Hard X-ray Nanoprobe beamline at the National Synchrotron Light Source – II facility.
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